Optimization of the Electrodes Geometrical Shape for the Electrostatic Deflector in the SEM

The quadruple electrostatic deflectors has been designed and studied in this paper. Three different geometrical shapes of electrodes were handled; Planar, concave, and convex. Wide comparison between these electrodes was realized using a new version of finite element method magnetics (FEMM) to analyze their properties. The optimized geometrical shape of the deliberated electrodes will be chosen to use it as an electrode in the electrostatic deflector inside the objective lens for low voltage scanning electron microscope (SEM) to directing the charged particles electron beam passes throughout the optical axis of the lens towards the tested specimen